Scatterometer without movement - Roughness measurement system for « extra smooth » surface

BACKGROUND

Surface quality controls are important for manufacturing processes including the machining of mechanical parts for the automobile or else for manufacturing of semiconductors or optical components.

Today, surface roughness measurements are performed by scatterometers. They measure the roughness spectrum by analyzing the light scattered in different directions by the sample. These measures are performed by shifting either the light source, the sample, or the detector. This requires both a very precise mechanical appliance and important acquisition time.

HOW IT WORKS

The scatterometer without movement allows to measure the surface roughness of  a material on a wide frequency band in a single shot, in one direction, without mechanical scanning and without wavelength scanning.

The system allows getting almost instantaneous measurements and is suitable for in-situ or on line measurement due of its small size, simplicity and speed.

KEY BENEFITS

• No mechanical scanning
• No wavelength scanning
• Faster acquisition speed
• Very good spectral resolution
• In-situ or on line measurement
• Small size and low cost

DEVELOPMENT STATUS

• Proof of concept by numerical simulation
• Prototype under development
• Strong expertise of the laboratory in the field

APPLICATIONS

• Contactless surface metrology
• Semiconductors
• Optical components
• Cosmetics…