Simultaneous atomic absorption analysis of multiple elements

DESCRIPTION

The technological solution developed allows the simultaneous measurement of several atomic flow in a simple and robust way.
For each element, a hollow cathode lamp emits several specific lines to the chosen element, and one or more of emitted lines
are detected by a 1D spectrometer.

The instrument consists of:

• Luminous objects such as cathode lamps at the wavelengths of the materials of interest
• A double core optical fiber
• A 1D spectrometer
• Real-time image processing software

APPLICATIONS

Microelectronics equipements:

• Epitaxy (MBE, MOCVD…)
• Thin layer deposition (CVD, Evaporation)