MICRO-PUMP : MEMS Micro Pump

SATT NORD



02 Juin 2015

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Fields

Engineering NICT

Sectors

Electronics & Security
NICT
Health

Innovation
● Flow generation without pumping chamber nor valves, with throughput and flow direction being
controlled by a device without any mechanical moving parts,


Results
● The micro device creates a flow without pumping chamber nor valves,
● The flow issues of the movement of a flexible polymer membrane slotted to force the fluid flow
● Oscillations are driven by an electronically controlled micro solenoid.

Benefits : 

  • Compactness and simplicity hence reliability (no chamber, no moving mechanical parts),
  • No friction, low vibration level, low noise,
  • No wear nor particles produced by mechanical parts friction,
  • Throughput and flow direction by electronic direct control,
  • Low production cost,
  • Pumps network easily packed in a complex shape and individually controlled,
  • Building materials adaptable to the fluid chemistry and viscosity
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