Efficient and flexible thin film piezoelectric PZTmicro generator

PZT is a traditionally preferred piezoelectric material due to its higher electromechanical coupling coefficients than other conventional piezoelectric materials. In order to reach low frequencies, it is crucial to increase the PZT
flexibility.

This technology offer presents an easy and cost effective process which provides a flexible and efficient piezoelectric PZT micro generator.

KEY BENEFITS:

• Easy and cost effective process
• Flexible PZT micro generator
• Ability to work at low frequencies (between 0,1 HZ and 10 Hz)
• Efficiency of the device (microwatt per cm² )