OPTOMECHANICAL THZ SENSOR

The most advanced commercial technologies for the detection of Terahertz (THz) and far infrared electromagnetic waves have major drawbacks : bolometers work at very low temperatures (4 Kelvin), while Golay cells are notoriously slow (20 Hz). Furthermore, those detectors are bulky, with a typical volume of the device in the 10cm x 10cm x 10cm range. Our MEMS device has a volume in the mm3 range and has a very quick response time (MHz) It works at ambient temperatures. It is possible to tune precisely the resonance frequency of the sensor at production time.

Competitive advantages :

• Small dimensions (nano to millimeter size)
• Works at ambient temperatures
• Very short response time (MHz)
• Sensivity (equivalent to Golay cells but could be further improved)
• Easy integration (MEMS technology)

Applications :

• Spectroscopy for security and nondestructive testing
• Imaging applications : THz cameras
• Information carrier conversion from THz wave to an optical fiber

Keywords : THz, Far-infrared, Bolometer, Golay cell, Noise Equivalent Power (NEP)